HAMAMATSU 滨松 EQ-77-QZ-S 激光驱动光源 (LDLS)
特点
- Extremely broad wavelength range:170 nm to 2500 nm
- Long lifetime:10 000 hours
- High radiance from a small plasma
光谱辐射照度
详细参数
Parameter | Description / Value | Unit |
---|
Optical interface*1 | Diverging beam (Single beam) | - |
Wavelength range | 170 to 2500 | nm |
Plasma size (FWHM) | Typ. | 125 × 320 | μm |
Numerical aperture | NA | 0.5 | - |
Lifetime*2 | Typ. | 10 000 | h |
Warm-up time | 30 | min |
Laser class | Class 1 | - |
Spectral radiance(at 500 nm) | Typ. | 75 | mW/mm2·sr·nm |
Broadband optical power | Typ. | 2.75 | W |
Output window size | Φ22 | mm |
Window material*3 | Quartz | - |
Cooling method | Water cooling*4*5 | - |
Nitrogen purge | Required. Grade 4.8 or higher, filtered to 5 μm. 20 psiG ±2 psiG | - |
Applicable standards | EN 61010-1 EN 61326-1 IEC 60825-1 IEC 62471 EN 50581 | - |
Device configuration | Lamphead, Power supply controller, Remote control, Necessary cables | - |
Power rating | Input voltage (AC) | 100 to 240 | V |
Power frequency | 50 / 60 | Hz |
Power consumption | 350 | W |
*1 Dual-beam output mode can be selected as an option. See page 4 for detailed information.
*2 Windows may need to be replaced depending on the extent of contamination and usage conditions.
*3 YAG (190 nm to 2500 nm) and BK7 (350 nm to 2500 nm) windows are also selectable as options.
*4 Cooling water conditions Lamphead: ≥0.5 L/min, 18 °C to 30 °C, 100 psiG (0.69 MPa) max. inlet pressure Controller: No cooling required
*5 A chiller kit is available as an option.
外形尺寸图(单位:mm)
Lamphead
Controller
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